Polarity inversion of ferroelectric AlScN films by radio frequency power
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 593651
Date of Publication: 2025-12-15
Journal: THIN SOLID FILMS
Volume: 832
ISSN: 0040-6090
Key Words: ALN FILMS; ALUMINUM NITRIDE; DEFECTS