Enhanced capacitive performance and stability of on-chip micro-supercapacitor electrode films via TiN-Mo2N alloying and laminating strategies
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 475094
Date of Publication: 2025-02-01
Journal: CHEMICAL ENGINEERING JOURNAL
Volume: 505
ISSN: 1385-8947
Key Words: MICROSTRUCTURE; MO CONTENT; MOLYBDENUM NITRIDES; MORPHOLOGY; OXIDATION; THIN-FILM; TIN FILMS; TITANIUM NITRIDE FILMS; VANADIUM NITRIDE; WEAR