Tuning the structural and electrical properties of TiNx thin films with low temperature coefficient of resistance
Release Time:2026-03-17 Hits:
Indexed by: Journal Papers
Document Code: 476843
Date of Publication: 2025-10-15
Journal: APPLIED SURFACE SCIENCE
Volume: 706
ISSN: 0169-4332
Key Words: DEPOSITION; ELECTRONIC-PROPERTIES; FLOW-RATE; INTERNAL-STRESS; NITROGEN PARTIAL-PRESSURE; RESISTIVITY; RESISTORS; TITANIUM; TRANSPORT-PROPERTIES