Investigation of enhanced capacitive performance and oxidation behavior of TiMoN film electrodes for on-chip micro-supercapacitor
Release Time:2026-06-26 Hits:
Indexed by: Journal Papers
Document Code: 599223
Date of Publication: 2026-06-01
Journal: APPLIED MATERIALS TODAY
Volume: 50
ISSN: 2352-9407
Key Words: CRN THIN-FILMS; ELECTROCHEMICAL PERFORMANCE; EVOLUTION; MICROSTRUCTURE; MOLYBDENUM NITRIDES; N FILMS; STORAGE; TITANIUM NITRIDE; VANADIUM NITRIDE