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Mechanism of point-defect-driven evolution in ferroelectricity of AlScN films

Release Time:2026-06-26  Hits:

Indexed by: Journal Papers

Document Code: 598917

Date of Publication: 2026-03-30

Journal: APPLIED PHYSICS LETTERS

Volume: 128

Issue: 13

ISSN: 0003-6951

Key Words: FIELD-CYCLING BEHAVIOR

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