Release Time:2026-06-26 Hits:
Indexed by: Journal Papers
Document Code: 597454
Date of Publication: 2026-04-15
Journal: SURFACES AND INTERFACES
Volume: 87
ISSN: 2468-0230
Prev One:磁控溅射Ti/TiN/TiON叠层薄膜电极及其性能调控
Next One:Mechanism of point-defect-driven evolution in ferroelectricity of AlScN films