Release Time:2026-06-26  Hits:

Indexed by: Journal Papers

Document Code: 597146

Date of Publication: 2026-01-01

Journal: 材料科学与工艺

Page Number: 1-10

ISSN: 1005-0299

Key Words: FIB-SEM; lectrochemical performance; magnetron sputtering; substrate bias; Ti/TiN/TiON laminated structure thin film electrode

CN: 23-1345/TB