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一种采用反应磁控溅射制备二氧化铪基铁电薄膜的方法

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First Author:Dayu ZHOU

Disigner of the Invention:sunnana,徐进,XU Jun,Zhang Yu,赵鹏

Affilication of Author(s):材料科学与工程学院

Application Number:ZL 2018 1 0171185.0

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