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一种钇掺杂二氧化铪铁电薄膜的制备方法

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First Author:Dayu ZHOU

Disigner of the Invention:sunnana,徐进,徐军,zhangyu,赵鹏

Affilication of Author(s):材料科学与工程学院

Application Number:CN108441831A

Authorization number:CN201810171317.X

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