Current position: Home >> Scientific Research >> Research Projects

超大超重非圆基板表面光刻胶纳米精度成膜技术与装备

Release Time:2021-02-04  Hits:

Leading Scientist: 周平

Project Participants: 张红哲,蔡引娣,闫英

Project Source: 国家科技部

Sub-Class of Project: Transformative Technology Key Scientific Issues

Status: 在研

Supported by: Chinese Academy of Sciences Shanghai Institute of Optics and Fine Mechanics

Nature of Project: 纵向

Project Approval Number: 2020YFA0714502

Date of Project Approval: 2020-12-22

Scheduled Completion Time: 2025-11-30

Date of Project Initiation: 2020-12-01

Prev One:聚四氟乙烯薄壁筒件车削精度变形分析

Next One:硅材料微观应力失效机理技术研究项目