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超大超重非圆基板表面光刻胶纳米精度成膜技术与装备

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Leading Scientist:周平

Project Participants:zhanghongzhe,caiyindi,yanying

Supported by:国家科技部

Sub-Class of Project:变革性技术关键科学问题

Status:在研

Supported by:中国科学院上海光学精密机械研究所

Nature of Project:纵向

Project Approval Number:2020YFA0714502

Date of Project Approval:2020-12-22

Scheduled completion time:2025-11-30

Date of Project Initiation:2020-12-01

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