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一种调节旋涂成膜腔室气氛的同步罩结构

Release Time:2023-11-07  Hits:

Leading Scientist: 周平

Project Participants: 闫英

Project Source: 企事业单位委托科技项目

Status: 在研

Supported by: Jiangsu Leibo Microelectronics Equipment Co., Ltd.

Nature of Project: 横向

Date of Project Approval: 2022-11-14

Scheduled Completion Time: 2023-10-31

Date of Project Initiation: 2022-11-14

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