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一种调节旋涂成膜腔室气氛的同步罩结构

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Leading Scientist:周平

Project Participants:yanying

Supported by:企事业单位委托科技项目

Status:在研

Supported by:江苏雷博微电子设备有限公司

Nature of Project:横向

Date of Project Approval:2022-11-14

Scheduled completion time:2023-10-31

Date of Project Initiation:2022-11-14

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