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化学机械抛光过程跨尺度多场耦合问题的建模与协同求解方法研究

Release Time:2016-08-09  Hits:

Leading Scientist: 周平

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51475076

Date of Project Approval: 2014-09-01

Scheduled Completion Time: 2018-12-31

Date of Project Initiation: 2015-01-01

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