Current position: Home >> Scientific Research >> Paper Publications

Numerical study on thermal deformation characteristic of water-cooled mirror with interdigitated channels

Release Time:2023-01-19  Hits:

Date of Publication: 2022-10-07

Journal: APPLIED THERMAL ENGINEERING

Institution: 化工学院

Volume: 98

Page Number: 357-364

ISSN: 1359-4311

Prev One:Physically-based modeling of pad-asperity scale chemical-mechanical synergy in chemical mechanical polishing

Next One:Numerical studies on scavenging reaction in confined etchant layer technique (CELT)