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Elastic recovery of monocrystalline silicon during ultra-fine rotational grinding

Release Time:2023-01-19  Hits:

Date of Publication: 2022-10-02

Journal: PRECISION ENGINEERING JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEE

Institution: 机械工程学院

Volume: 65

Page Number: 64-71

ISSN: 0141-6359

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