Stable nanodepth and nanogram level material removal in electrochemically induced chemical etching of fused quartz
Release Time:2024-05-09 Hits:
Indexed by: Journal Papers
Document Code: 383621
Date of Publication: 2023-10-01
Journal: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume: 85
Page Number: 183-190
ISSN: 0141-6359
Key Words: MICROSCOPY; SILICA