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Study of Prefabricated Crack Propagation on Monocrystalline Silicon Surfaces for Grinding Damage Analysis

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Date of Publication:2024-09-02

Journal:MATERIALS

Volume:17

Issue:15

Key Words:BRITTLE MATERIALS; CERAMICS; DEPTH; DOUBLE SCRATCH; INDUCED SUBSURFACE DAMAGE; OPTICAL-GLASS; PLASTIC INDENTATION DAMAGE; PREDICTIVE MODEL; ROUGHNESS; WAFER

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