Study of Prefabricated Crack Propagation on Monocrystalline Silicon Surfaces for Grinding Damage Analysis
Release Time:2024-09-03 Hits:
Indexed by: Journal Papers
Document Code: 394966
Date of Publication: 2024-08-01
Journal: MATERIALS
Volume: 17
Issue: 15
Key Words: BRITTLE MATERIALS; CERAMICS; DEPTH; DOUBLE SCRATCH; INDUCED SUBSURFACE DAMAGE; OPTICAL-GLASS; PLASTIC INDENTATION DAMAGE; PREDICTIVE MODEL; ROUGHNESS; WAFER