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抛光垫微观接触对化学机械抛光材料去除的影响及其跨尺度建模方法

Release Time:2024-09-03  Hits:

Date of Publication: 2024-05-14

Journal: 金属加工(冷加工)

Issue: 08

Page Number: 78

Key Words: 化学机械抛光; 建模方法; 微观接触; 抛光垫; 材料去除

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