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Role of alumina particles in chemical-mechanical synergies in ruthenium polishing

Release Time:2024-09-16  Hits:

Date of Publication: 2024-09-06

Journal: JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Volume: 330

ISSN: 0924-0136

Key Words: CMP; COLLOIDAL SILICA; COPPER; H2O2; POTASSIUM PERIODATE; RU; SLURRY; SPECTROSCOPY; SURFACE; WEAR

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