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Role of alumina particles in chemical-mechanical synergies in ruthenium polishing

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Date of Publication:2024-09-06

Journal:JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

Volume:330

ISSN No.:0924-0136

Key Words:CMP; COLLOIDAL SILICA; COPPER; H2O2; POTASSIUM PERIODATE; RU; SLURRY; SPECTROSCOPY; SURFACE; WEAR

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