Role of alumina particles in chemical-mechanical synergies in ruthenium polishing
Release Time:2024-09-16 Hits:
Indexed by: Journal Papers
Document Code: 395260
Date of Publication: 2024-09-01
Journal: JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume: 330
ISSN: 0924-0136
Key Words: CMP; COLLOIDAL SILICA; COPPER; H2O2; POTASSIUM PERIODATE; RU; SLURRY; SPECTROSCOPY; SURFACE; WEAR