Influence of substrate edge chamfer geometric features on the edge effect of spin-coating film
Release Time:2024-11-18 Hits:
Indexed by: Conference Paper
Document Code: 401237
Date of Publication: 2024-01-01
Journal: Journal of Physics: Conference Series
Volume: 2842
Issue: 1
ISSN: 1742-6588
Key Words: Edge-effects; Geometric feature; Spin-coating film; Spin-coating method; Spin coating process; Thin film fabrication