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碳化硅磨削亚表面损伤检测方法

Release Time:2019-03-10  Hits:

Indexed by: Journal Article

Date of Publication: 2015-08-20

Journal: 金刚石与磨料磨具工程

Included Journals: ISTIC

Volume: 35

Issue: 4

Page Number: 60-65

ISSN: 1006-852X

Key Words: RB-SiC;金刚石砂轮;磨削;亚表面损伤

Abstract: 反应烧结碳化硅(reaction bonded SiC,RBSiC)有着良好的物理和机械性能,在空间光学领域应用广泛。分别采用截面显微法和角度抛光法研究了金刚石砂轮磨削反应烧结碳化硅的亚表面损伤。实验结果表明:应用截面显微法能更直观地反映出损伤的形态和分布特征,角度抛光法测量损伤深度更为精确,亚表面损伤主要以凹坑和微裂纹的形式存在,主要发生在 SiC 颗粒上,且砂轮粒度对损伤影响很大。

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