Current position: Home >> Scientific Research >> Patents

一种新型CMP抛光垫修整器

Hits:

First Author:Dong Zhigang

Disigner of the Invention:Renke Kang,段佳冬,zhuxianglong,Zhou Ping

Application Number:CN201610457781.6

Authorization Date:2016-06-21

Authorization number:CN106078516A

Pre One:一种薄壁筒类工件内圆磨削径向定位单元及定位装卡装置

Next One:电致化学抛光方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep