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Nikon光刻机智能化数据分析与监控平台

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Leading Scientist:王智慧

Supported by:自选课题

Status:在研

Supported by:上海乾鲲电子材料有限公司

Nature of Project:横向

Date of Project Approval:2024-11-22

Scheduled completion time:2025-11-01

Date of Project Initiation:2024-11-05

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Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

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