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基于空耦超声激励的微结构模态频率温度特性研究

Release Time:2025-04-08  Hits:

Indexed by: Journal Papers

Document Code: 398343

Date of Publication: 2024-06-15

Journal: 国外电子测量技术

Volume: 43

Issue: 06

Page Number: 127-133

ISSN: 1002-8978

Key Words: air-coupled ultrasonic excitation; flexural vibration modal; microstructures; temperature coefficient of frequencies

CN: 11-2268/TN

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