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基于空耦超声激励的微结构模态频率温度特性研究

Release Time:2025-04-08  Hits:

Date of Publication: 2024-10-10

Journal: 国外电子测量技术

Volume: 43

Issue: 6

Page Number: 127-133

ISSN: 1002-8978

Key Words: 弯曲振动模态; 微结构; 空耦超声激励; 频率温度系数

CN: 11-2268/TN

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