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基于空耦超声激励的微结构模态频率温度特性研究

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Date of Publication:2024-10-10

Journal:国外电子测量技术

Volume:43

Issue:6

Page Number:127-133

ISSN No.:1002-8978

Key Words:弯曲振动模态; 微结构; 空耦超声激励; 频率温度系数

CN No.:11-2268/TN

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