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Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique.

Release Time:2016-10-02  Hits:

Indexed by: Journal Papers

Date of Publication: 2019-03-29

Journal: Plasma Science & Technology

Volume: 12

Issue: 4

Page Number: 461-465

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