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半导体集成电路用高纯六氟丙烷材料制备与工程化技术研究

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Leading Scientist:刘家旭

Supported by:企事业单位委托科技项目

Sub-Class of Project:省部级

Status:在研

Supported by:辽宁省科学技术厅

Nature of Project:纵向

Project Approval Number:2023JH1/10400078

Date of Project Approval:2023-07-01

Scheduled completion time:2026-06-30

Date of Project Initiation:2023-07-01

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