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一种砷、磷元素共掺制备n型多晶硅靶材的铸造工艺

Release Time:2019-10-11  Hits:

First Author: 王凯

Disigner of the Invention: Yi Tan,李鹏廷

Application Number: CN201811025321.1

Authorization Date: 2018-09-04

Authorization Number: CN109082643A

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