Current position: Home >> Scientific Research >> Patents

一种横向凝固叠加电场提高多晶硅提纯得率的设备和方法

Hits:

First Author:Yi Tan

Disigner of the Invention:庄辛鹏,renshijiang,lipengting,lijiayan

Affilication of Author(s):材料科学与工程学院

Application Number:ZL 201611258337.8

Authorization number:201611258337.8

Pre One:一种高纯多晶硅溅射靶材及其制备方法和应用

Next One:一种电子束熔炼与单晶提拉耦合的装置及方法