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个人信息Personal Information
副教授
博士生导师
硕士生导师
性别:男
毕业院校:大连理工大学
学位:博士
所在单位:机械工程学院
学科:微机电工程. 机械电子工程. 机械制造及其自动化
办公地点:新机械楼6126
联系方式:0411-84707713-2152
电子邮箱:zhangr@dlut.edu.cn
Single-Layer Nanowire Polarizer Integrated With Photodetector and Its Application for Polarization Navigation
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论文类型:期刊论文
发表时间:2016-09-01
发表刊物:IEEE SENSORS JOURNAL
收录刊物:SCIE、EI、Scopus
卷号:16
期号:17
页面范围:6579-6585
ISSN号:1530-437X
关键字:Nanoimprint lithography (NIL); polarization navigation; integration process
摘要:We report a method of integrating the single-layer nanowire polarizers with photodetectors, and the fabricated device is used as the polarization navigation sensor. The fabrication processes mainly based on nanoimprint lithography and dry etching. The fabrication method can fabricate nanogratings with multi-orientation simultaneously, so angular alignment error is eliminated. The external quantum efficiency of the integrated device is tested, and a peak external quantum efficiency of 23% at around 440 nm is achieved. The indoor angle output experiment of a navigation sensor is investigated, and the angle output error is tested to be within +/- 0.1 degrees. The outdoor angle output experiment has also been tested, and the errors are less than +/- 1.5 degrees. The measurement results show that the fabricated device is suitable for polarization navigation.