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论文类型：期刊论文

发表时间：2016-07-01

发表刊物：JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS

收录刊物：SCIE、EI、Scopus

卷号：15

期号：3

ISSN号：1932-5150

关键字：polarization sensor; nanowire grating; nanoimprint; integration process

摘要：A simple integration process of single-layer nanowire gratings (SLNGs) for polarization navigation sensor is proposed. The adaptive capacity of the nanoimprint process on uneven substrate is realized using compressed air and the flexible mold. The plasma ashing process is used to simplify the conventional SLNGs fabrication process. Based on the work mentioned above, six SLNGs areas with 1.3 mm x 1.3 mm and six different directions are successfully integrated into a polarization sensitive structure applied to a polarization navigation sensor. The measurement result of quantum efficiency shows good sensitivity, and the angle of polarization measurement error is < +/- 0.1 deg. The experiment result shows that the proposed process is applicable for the integration of large-area single-layer nanometal patterns. (C) 2016 Society of Photo-Optical Instrumentation Engineers (SPIE)