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Indexed by:期刊论文

Date of Publication:2013-07-01

Journal:SENSORS

Included Journals:SCIE、PubMed、Scopus

Volume:13

Issue:7

Page Number:9070-9084

ISSN No.:1424-8220

Key Words:piezo-based platform; ultra-precision angle motion; robust composite control

Abstract:The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-rad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 rad, which is approximately equal to the noise level.