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A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 inch large area

Release Time:2023-01-08  Hits:

Date of Publication: 2022-10-05

Journal: Scientific Reports

Institution: 电子信息与电气工程学部

Volume: 6

Issue: 1

Page Number: 1892101-1892110

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