location： Current position: Home >> Scientific Research >> Paper Publications

A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 inch large area

Hits:

Date of Publication:2022-10-05

Journal:Scientific Reports

Affiliation of Author(s):电子信息与电气工程学部

Volume:6

Issue:1

Page Number:1892101-1892110

Pre One:A novel bonding method for fabrication of PET planar nanofluidic chip with low dimension loss and high bonding strength

Next One:A novel 2D silicon nano-mold fabrication technique for linear nanochannels over a 4 inch diameter substrate
Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep