Hits:
Date of Publication:2022-10-05
Journal:JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume:25
Issue:8
ISSN No.:0960-1317
Pre One:A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips
Next One:A novel 2D silicon nano-mold fabricationtechnique by inclined-deposition and Ar etching over 4 inch large area