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A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips

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Date of Publication:2022-10-05

Journal:JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume:28

Issue:11

ISSN No.:0960-1317

Pre One:A low-cost method of fabricating hybrid micro-nano fluidic chip by double-layer PDMS mold and UV-thermal nanoimprinting

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