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A new low-cost fabrication method of SU-8 micro-nano channels and needle tip in electro-hydrodynamic jet chips

Release Time:2023-01-08  Hits:

Date of Publication: 2022-10-05

Journal: JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume: 28

Issue: 11

ISSN: 0960-1317

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