Associate Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates
Title of Paper:Reaction dynamics simulation of MoO2 cluster precursor with melting, deoxygenation and sulfuration for MoS2 growth by chemical vapor deposition
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Date of Publication:2024-09-05
Journal:APPLIED SURFACE SCIENCE
Volume:669
ISSN No.:0169-4332
Key Words:CVD; ENERGY; FIELD; LAYERS; MOLYBDENUM-DISULFIDE; MONOLAYER MOS2; REAXFF; SULFIDATION; SULFURIZATION
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