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一种基于超临界流体脉冲的半导体薄膜可控生长系统
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First Author:徐琴琴
Disigner of the Invention:柳宝林,银建中,王启博,王志刚
Institution:化工学院
Application Date:2020-09-11
Application Number:202010950475.2
Authorization Date:2021-09-24
Authorization Number:ZL 202010950475.2
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