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激光散射检测半导体硅片亚表面损伤的基础研究

Release Time:2019-03-21  Hits:

Leading Scientist: 张璧

Project Participants: 白倩,Shang GAO

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51575084

Date of Project Approval: 2015-08-18

Scheduled Completion Time: 2019-12-31

Date of Project Initiation: 2016-01-01

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