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激光散射检测半导体硅片亚表面损伤的基础研究

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Leading Scientist:zhangbi

Project Participants:baiqian,Shang GAO

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:51575084

Date of Project Approval:2015-08-18

Scheduled completion time:2019-12-31

Date of Project Initiation:2016-01-01

Pre One:超薄激光晶片的超精密加工工艺及几何精度和表面质量协调控制方法