XEuVXzTxyRXKBg5IgetWLbqipAE2gqTquLQVPOa0c4ahSmJ12h8HDXnlhudk
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超薄激光晶片的超精密加工工艺及几何精度和表面质量协调控制方法

Release Time:2019-03-21  Hits:

Leading Scientist: zhuxianglong

Project Participants: 戴恒震,白倩,Shang GAO

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 51775084

Date of Project Approval: 2017-08-17

Scheduled Completion Time: 2021-12-31

Date of Project Initiation: 2018-01-01

Date of Project Completion: 2022-04-18

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