Depolarization of surface scattering in polarized laser scattering detection for machined silicon wafers
Release Time:2023-03-09 Hits:
Date of Publication: 2022-10-06
Journal: PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume: 73
Page Number: 203-213
ISSN: 0141-6359
Key Words: "Polarized laser scattering; Depolarization; Surface roughness; Subsurface damage; Monocrystalline silicon"