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Depolarization of surface scattering in polarized laser scattering detection for machined silicon wafers

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Date of Publication:2022-10-06

Journal:PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY

Volume:73

Page Number:203-213

ISSN No.:0141-6359

Key Words:"Polarized laser scattering; Depolarization; Surface roughness; Subsurface damage; Monocrystalline silicon"

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