Hits:
Date of Publication:2022-10-06
Journal:Chinese Journal of Mechanical Engineering
Affiliation of Author(s):机械工程学院
Volume:30
Issue:6
Page Number:1476-1476
ISSN No.:1000-9345
Pre One:P SD法在超精密加工质量评价中的应用
Next One:Depolarization of surface scattering in polarized laser scattering detection for machined silicon wafers
