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飞秒激光烧蚀石英玻璃表面质量分析

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Indexed by:期刊论文

Date of Publication:2022-06-26

Journal:机械工程学报

Affiliation of Author(s):机械工程学院

Issue:23

Page Number:194-199

ISSN No.:0577-6686

Abstract:The influences of polarization state on ablation line width and morphology are investigated based on line experiments of different laser power. The surface ablation experiments of different line overlap rateδ are carried out in the combination of linear ablation optimized parameters. Also, the surface roughness is analyzed by using surface profiler. In addition, the relational expressions of scanning velocity and line overlap rate on the influence of scallop height are established, and then the expressions are calculated. The results show that the ablation line quality of linearly polarized laser is better than the circularly polarized laser, and its line width is greater than that of circularly polarized laser. Whenδ increases from 65% to 90%, the arithmetical mean deviationRa of ablation surface for linearly polarized laser decreases firstly and then increases, and it reaches to a minimum of 1.05μm atδ=80%. But, theRaof circularly polarized laser decreases with the increasing ofδ, and it reaches to a minimum of 1.63μm atδ=90%. The calculated results of roughnessRz are consistent with the experimental results, and it is a kind of linear relation betweenRz andδ. Also, theRzdecreases with the increasing ofδ.

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