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一种超短脉冲激光烧蚀氮化硅的模拟计算方法

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First Author:WU Dongjiang

Disigner of the Invention:姚龙元,Ma Guangyi,Niu Fangyong,Dongming Guo

Application Number:CN201310086318.1

Authorization Date:2013-03-18

Authorization number:CN103268064A

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