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一种超短脉冲激光烧蚀氮化硅的模拟计算方法

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First Author:WU Dongjiang

Disigner of the Invention:姚龙元,Ma Guangyi,Niu Fangyong,Dongming Guo

Affilication of Author(s):机械工程学院

Application Number:CN103268064A

Authorization number:CN201310086318.1

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