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一种超短脉冲激光烧蚀氮化硅的模拟计算方法

Release Time:2022-10-19  Hits:

First Author: WU Dongjiang

Disigner of the Invention: 姚龙元,马广义,Niu Fangyong,Dongming Guo

Institution: 机械工程学院

Application Number: CN103268064A

Authorization Number: CN201310086318.1

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