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基于2英寸蓝宝石衬底的大面积氮化硼薄膜制备

Release Time:2019-03-21  Hits:

Leading Scientist: 梁红伟

Project Participants: 夏晓川,申人升,张贺秋,柳阳,Luo Yingmin

Project Source: 企事业单位委托科技项目

Status: 结题

Supported by: Chinese Academy of Sciences Shanghai Institute of Microsystem and Information Technology

Nature of Project: 横向

Date of Project Approval: 2017-04-28

Scheduled Completion Time: 2017-06-15

Date of Project Initiation: 2016-12-15

Date of Project Completion: 2020-06-30

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