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Indexed by:期刊论文

Date of Publication:2009-09-21

Journal:Materials Science Forum

Included Journals:EI、CPCI-S、Scopus

Volume:628 629

Page Number:405-410

ISSN No.:0878493123

Key Words:PZT; Micromoulding; Electrohydrodynamic atomization; MEMS

Abstract:In this paper, electrohydrodynamic atomization combined with a polymeric micromoulding technique was used to form PZT single element devices using a PZT sol-gel slurry without an etching process. The PZT single element device was initially designed to work as a piezoelectric ultrasonic transducer consisting of a circular or a square of various sizes, which was produced and used to evaluate the process. The resulting PZT device had a homogenous microstructure. It was observed that the relative permittivity of the circular and square single element devices was especially high at small size due to the fringe effect. The results show that the radius and width of the PZT single circular and square element devices with a thickness of 15μm should be bigger than 400μm in order to reduce the fringe effect. © (2009) Trans Tech Publications, Switzerland.