论文成果
A mixed elastohydrodynamic lubrication model with layered elastic theory for simulation of chemical mechanical polishing
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  • 发表时间:2022-10-04
  • 发表刊物:INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
  • 所属单位:机械工程学院
  • 文献类型:J
  • 卷号:69
  • 期号:5-8
  • 页面范围:1009-1016
  • ISSN号:0268-3768

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