论文成果
Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process
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  • 发表时间:2022-10-02
  • 发表刊物:Chinese Physics B
  • 所属单位:机械工程学院
  • 文献类型:J
  • 卷号:27
  • 期号:6
  • ISSN号:1674-1056

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