|
个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中国科学院长春光学精密机械与物理研究所
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械学院大方楼5021
联系方式：djwudut@dlut.edu.cn 84707625
电子邮箱：djwudut@dlut.edu.cn
Fabrication of SU-8 photoresist micro-nanofluidic chips by thermal imprinting and thermal bonding
点击次数：
论文类型：期刊论文
发表时间：2022-06-09
发表刊物：MICROSYSTEM TECHNOLOGIES
卷号：26
期号：3
页面范围：861-866
ISSN号：0946-7076
摘要：Micro-nanofluidic chips have been widely applied in biological and medical fields. In this paper, a simple and low-cost fabrication method for micro-nano fluidic chips is proposed. The nano-channels are fabricated by thermal nano-imprinting on an SU-8 photoresist layer followed by thermal bonding with a second SU-8 photoresist layer. The micro-channels are produced on the second layer by UV exposure and then thermal bonded by a third layer of SU-8 photoresist. The final micro-nano fluidic chip consists of micro-channels (width of 200.0 +/- 0.1 mu m and, depth of 8.0 +/- 0.1 mu m) connected by nano-channels (width of 533 +/- 6 nm and, depth of 372 +/- 6 nm), which has great potential in molecular filtering and detection.