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发表时间：2007-01-01

发表刊物：光学精密工程

所属单位：机械工程学院

期号：8

页面范围：1263-1268

ISSN号：1004-924X

摘要：Based on image processing toolbox of Matlab technique, a new evaluation method of cleaning efficiency is presented in dry laser cleaning particles of silicon wafer surface. Image processing toolbox of Matlab is used to recognize optical information of silicon wafer surface before and after laser cleaning and the evaluating programs are developed to count the number of pollution particles on the silicon wafer and evaluate the cleaning efficiency. The results show that the statistical accuracy of the method is 97.6%, and the laser cleaning accuracy reaches 99.2%. The research achievement offers an effective, rapid and accurate evaluation method.

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