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发表时间：2015-01-01

发表刊物：中国激光

所属单位：机械工程学院

卷号：42

期号：3

页面范围：0303009

ISSN号：0258-7025

摘要：In order to realize the precisely thinning of flute on the surface of
   quartz by femtosecond laser, the line - surface ablation process means
   are taken to study the effects of the pulse energy on the ablation
   morphology of groove, and the ablation experimental research of flute
   with different line overlap rates delta are carried out. The laser
   scanning confocal microscope is used to observe and analyze the depth,
   bottom surface roughness and other morphology features of flute. The
   results show that when the line overlap rate delta satisfies 40%≤ delta
   ≤80%, with the increase of delta, the depth and sidewall angle of flute
   decrease, when delta is 40%, the depth, width and sidewall angle of
   groove is 14.56 mum, 261.8 mum and 59.1°, respectively. The bottom
   surface roughness decreases as well, when delta is 80%, R_a and R_z
   reach the minimum of 0.19 mum and 1.23 mum, respectively. The profile
   fluctuation parallel to scanning speed increases at first then
   decreases, when delta =80%, R_a′ R_a, R_z′ R_z; The root mean square of
   bottom surface Sq decreases with the increase of delta, S_q reaches the
   minimum of 0.16 mum when delta is 80%.

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