吴东江

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:男

毕业院校:中国科学院长春光学精密机械与物理研究所

学位:博士

所在单位:机械工程学院

学科:机械制造及其自动化

办公地点:机械学院大方楼5021

联系方式:djwudut@dlut.edu.cn 84707625

电子邮箱:djwudut@dlut.edu.cn

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长脉宽激光硅片弯曲成形温度机制研究

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发表时间:2009-01-01

发表刊物:大连理工大学学报

所属单位:机械工程学院

期号:4

页面范围:531-535

ISSN号:1000-8608

摘要:According to the experiment of laser bending silicon with long pulse width,the temperature distribution characteristics of silicon during process of laser bending is analyzed by Ansys software.The calculated results indicate that the steep temperature fluctuation in one point exists during process of scanning,meanwhile in the later half-period of first scanning,brittle-ductile temperature transforming point appears,so the first scanning is considered as the pre-heated silicon,that is in line with the phenomena of experiment.In the later process of scanning,TGM (temperature gradient mechanism) and BM (buckling mechanism) are proved to be in existence according to the different temperatures between top and bottom surfaces,and the proportional relationship of spot diameter and thickness as well as the temperature increment is less as the increase of scanning times through the analysis for initial and maximum temperature,and finally the temperature distribution is hardly changing.

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